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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - Integration issues for pressure sensors
Gogoi, Bishnu P., Monk, David J., Maudie, Theresa, Miller, Todd F., Torres, Jose, Smith, James H., Karam, Jean MichelVolume:
3874
Year:
1999
Language:
english
DOI:
10.1117/12.361220
File:
PDF, 1.38 MB
english, 1999