Evaluation of silicon tuning fork resonators under...

Journal of Micro/Nanolithography MEMS and MOEMS 2014 / 12 Vol. 13; Iss. 4

Evaluation of silicon tuning fork resonators under mechanical loads and space-relevant radiation conditions

Bandi, Tobias, Baborowski, Jacek, Dommann, Alex, Shea, Herbert R., Cardot, Francis, Neels, Antonia
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Volume:
13
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.13.4.043019
Date:
December, 2014
File:
PDF, 1.73 MB
english, 2014
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