![](/img/cover-not-exists.png)
3-D Mechanical Analysis of Magnetic- Pneumatic Microfabrication Stage
Liu, Xue Peng, Zhao, Dong MeiVolume:
44-47
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.44-47.186
Date:
December, 2010
File:
PDF, 185 KB
english, 2010