SPIE Proceedings [SPIE First International Symposium on Laser Precision Microfabrication (LPM2000) - Omiya, Saitama, Japan (Wednesday 14 June 2000)] First International Symposium on Laser Precision Microfabrication - Molecular dynamics simulation of ablation process with ultrashort-pulsed laser
Ohmura, Etsuji, Fukumoto, Ichirou, Miyamoto, Isamu, Miyamoto, Isamu, Sugioka, Koji, Sigmon, Thomas W.Volume:
4088
Year:
2000
Language:
english
DOI:
10.1117/12.405692
File:
PDF, 3.97 MB
english, 2000