SPIE Proceedings [SPIE International Conference on Micro- and Nano-Electronics 2009 - Zvenigorod, Russian Federation (Monday 5 October 2009)] International Conference on Micro- and Nano-Electronics 2009 - CoSi2/TiO2/SiO2/Si gate structure formation
Rogozhin, A. E., Khorin, I. A., Naumov, V. V., Orlikovsky, A. A., Ovcharov, V. V., Rudakov, V. I., Vasiliev, A. G., Valiev, Kamil A., Orlikovsky, Alexander A.Volume:
7521
Year:
2010
Language:
english
DOI:
10.1117/12.854302
File:
PDF, 354 KB
english, 2010