Exposure and development of thick polydimethylglutarimide...

Journal of Micro/Nanolithography MEMS and MOEMS 2008 / 04 Vol. 7; Iss. 2

Exposure and development of thick polydimethylglutarimide films for MEMS applications using 254-nm irradiation

Foulds, Ian G.
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Volume:
7
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2909468
Date:
April, 2008
File:
PDF, 552 KB
english, 2008
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