SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachined Devices and Components IV - Micromachined angular rate sensor MARS-RR
Geiger, Wolfram, Kieninger, Martin, Pascal, Michael, Folkmer, Bernd, Lang, Walter, French, Patrick J., Chau, Kevin H.Volume:
3514
Year:
1998
Language:
english
DOI:
10.1117/12.323886
File:
PDF, 840 KB
english, 1998