SPIE Proceedings [SPIE Micromachining and Microfabrication...

  • Main
  • SPIE Proceedings [SPIE Micromachining...

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachined Devices and Components IV - Micromachined angular rate sensor MARS-RR

Geiger, Wolfram, Kieninger, Martin, Pascal, Michael, Folkmer, Bernd, Lang, Walter, French, Patrick J., Chau, Kevin H.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
3514
Year:
1998
Language:
english
DOI:
10.1117/12.323886
File:
PDF, 840 KB
english, 1998
Conversion to is in progress
Conversion to is failed