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Thermal Effect Analysis of Femtosecond Laser Scribing of Silicon
Wan, Da Ping, Mathew, Philip, Wang, JunVolume:
443
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.443.687
Date:
June, 2010
File:
PDF, 430 KB
english, 2010