Structure Control of Polycrystalline Silicon Films on Glass...

Key Engineering Materials 1999 Vol. 169-170

Structure Control of Polycrystalline Silicon Films on Glass Substrates and Their Properties

Kamiya, Toshio, Nakahata, Kouichi, Ro, Kazuyoshi, Tohti, J., Fortmann, Charles M., Shimizu, Isamu
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Volume:
169-170
Year:
1999
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.169-170.171
File:
PDF, 396 KB
1999
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