Preparation of Nano Structured SiOC Thin Film for Low k Application
Kwon, Woo Teck, Lee, J.H., Kim, Soo Ryong, Kim, H.T., Kim, Hyung Sun, Yu, Y.H., Kim, Young HeeVolume:
11
Language:
english
Journal:
Journal of Nano Research
DOI:
10.4028/www.scientific.net/jnanor.11.85
Date:
May, 2010
File:
PDF, 426 KB
english, 2010