ZrO2 Thin Film Deposition on TiN by Plasma Enhanced Atomic...

ECS Journal of Solid State Science and Technology 2014 / 01 Vol. 3; Iss. 3

ZrO2 Thin Film Deposition on TiN by Plasma Enhanced Atomic Layer Deposition Using Cyclopentadienyltris(dimetylamino)zirconium

Salaun, A., Veillerot, M., Pierre, F., Souchier, E., Jousseaume, V.
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Volume:
3
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.012403jss
Date:
January, 2014
File:
PDF, 3.40 MB
english, 2014
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