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SPIE Proceedings [SPIE SPIE Micro+Nano Materials, Devices, and Applications - Melbourne, Victoria, Australia (Sunday 8 December 2013)] Micro/Nano Materials, Devices, and Systems - Effect of the subsidiary electrode in a newly developed source lens structure of the microcolumn
Friend, James, Tan, H. Hoe, Oh, Tae-Sik, Kim, Dae-Wook, Kim, Ho Seob, Jang, Won KweonVolume:
8923
Year:
2013
Language:
english
DOI:
10.1117/12.2033780
File:
PDF, 510 KB
english, 2013