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SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] MEMS Design, Fabrication, Characterization, and Packaging - Profile control of SU-8 photoresist using different radiation sources
Cui, Zheng, Jenkins, Derek W., Schneider, Andreas, McBride, Geoff, Behringer, Uwe F. W., Uttamchandani, Deepak G.Volume:
4407
Year:
2001
Language:
english
DOI:
10.1117/12.425291
File:
PDF, 667 KB
english, 2001