SPIE Proceedings [SPIE 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014) - Harbin, China (Saturday 26 April 2014)] 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Effect of the inflated-pressure to the tool influence function for polishing using SR bonnet
Yang, Li, Ruch, Eric, Li, Shengyi, Wang, Chunjin, Yang, Xu, Zhong, Bo, Wang, Zhenzhong, Guo, Yinbiao, Xu, QiaoVolume:
9281
Year:
2014
Language:
english
DOI:
10.1117/12.2067758
File:
PDF, 1.56 MB
english, 2014