Parametric constraints in multi-beam interference

Journal of Micro/Nanolithography MEMS and MOEMS 2012 / 10 Vol. 11; Iss. 4

Parametric constraints in multi-beam interference

Burrow, Guy M., Gaylord, Thomas K.
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Volume:
11
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.11.4.043004
Date:
October, 2012
File:
PDF, 2.38 MB
english, 2012
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