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Shape slack: a design-manufacturing co-optimization methodology using tolerance information
Banerjee, Shayak, Agarwal, Kanak B., Nassif, Sani, Orshansky, MichaelVolume:
12
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.12.1.013014
Date:
February, 2013
File:
PDF, 2.25 MB
english, 2013