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Thermal Optimization of Cz Silicon Single Crystal Growth
Prostomolotov, A.I., Verezub, N.A., Milvidskii, M.G.Volume:
156-158
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.156-158.217
Date:
October, 2009
File:
PDF, 401 KB
english, 2009