Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas
Derzsi, A, Korolov, I, Schüngel, E, Donkó, Z, Schulze, JVolume:
24
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/24/3/034002
Date:
May, 2015
File:
PDF, 4.05 MB
english, 2015