SPIE Proceedings [SPIE SPIE Europe Optics + Optoelectronics - Prague, Czech Republic (Monday 20 April 2009)] Damage to VUV, EUV, and X-Ray Optics II - Direct structuring of solids by EUV radiation from a table-top laser produced plasma source
Barkusky, Frank, Bayer, Armin, Peth, Christian, Mann, Klaus, Juha, Libor, Bajt, Saša, Sobierajski, RyszardVolume:
7361
Year:
2009
Language:
english
DOI:
10.1117/12.822243
File:
PDF, 1.61 MB
english, 2009