SPIE Proceedings [SPIE 4th International Conference on Thin Film Physics and Applications - Shanghai, China (Monday 8 May 2000)] Fourth International Conference on Thin Film Physics and Applications - Si growth on the Si(III)3x3R30-B surface phase depending on the type of surface phase formation and initial boron coverage
Shaporenko, A. P., Korobtsov, V. V., Balashev, V. V., Chu, Junhao, Liu, Pulin, Chang, YongVolume:
4086
Year:
2000
Language:
english
DOI:
10.1117/12.408407
File:
PDF, 251 KB
english, 2000