Influence of Thermal Annealing on Ohmic Contacts and Device Isolation in AlGaN/GaN Heterostructures
Roccaforte, Fabrizio, Iucolano, Ferdinando, Giannazzo, Filippo, Moschetti, Giuseppe, Bongiorno, Corrado, Di Franco, Salvatore, Puglisi, V., Abbondanza, Giuseppe, Raineri, VitoVolume:
615-617
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.615-617.967
File:
PDF, 687 KB
english, 2009