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Effect of Magnetic Field Configuration of Dual Magnetron on Carbon Based Films Properties
Yurjev, Yuriy N., Zaitcev, Danil A., Sidelev, Dmitrii V, Tupikova, Olga S.Volume:
1040
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.1040.721
Date:
September, 2014
File:
PDF, 267 KB
english, 2014