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SPIE Proceedings [SPIE Optics East - Philadelphia, PA (Monday 25 October 2004)] Intelligent Systems in Design and Manufacturing V - A computer-based approach to energy conservation in semiconductor manufacturing
Mardikar, Yogesh M., Gopalakrishnan, Bhaskaran, Gopalakrishnan, BhaskaranVolume:
5605
Year:
2004
Language:
english
DOI:
10.1117/12.570811
File:
PDF, 88 KB
english, 2004