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Nanoscale thermal lithography by local polymer decomposition using a heated atomic force microscope cantilever tip
Saxena, ShubhamVolume:
6
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2743374
Date:
April, 2007
File:
PDF, 306 KB
english, 2007