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Low Temperature Impurity Diffusion into Large-Band-Gap Semiconductors
Bagraev, N.T., Bouravleuv, A.D., Gippius, A.A., Klyachkin, L.E., Malyarenko, A.M.Volume:
194-199
Year:
2001
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.194-199.679
File:
PDF, 459 KB
2001