Fabrication of Ni stamp with high aspect ratio, two-leveled, cylindrical microstructures using dry etching and electroplating
Petersen, Ritika Singh, Keller, Stephan Sylvest, Hansen, Ole, Boisen, AnjaVolume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/5/055021
Date:
May, 2015
File:
PDF, 3.36 MB
english, 2015