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Near-Room-Temperature Selective Oxidation on InAlAs and Application to In[sub 0.52]Al[sub 0.48]As∕In[sub 0.53]Ga[sub 0.47]As Metamorphic HEMTs
Lee, Kuan-Wei, Lee, Kai-Lin, Lin, Hsien-Chang, Tu, Chao-Hsien, Hu, Chih-Chun, Wang, Yeong-HerVolume:
154
Year:
2007
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2777883
File:
PDF, 911 KB
english, 2007