SPIE Proceedings [SPIE XX International Symposium on High Power Laser Systems and Applications - Chengdu, China (Monday 25 August 2014)] XX International Symposium on High-Power Laser Systems and Applications 2014 - Femtosecond laser induced surface structuring on silicon by diffraction-assisted micropatterning
Tang, Chun, Chen, Shu, Tang, Xiaolin, Wang, Shutong, Feng, GuoyingVolume:
9255
Year:
2015
Language:
english
DOI:
10.1117/12.2071378
File:
PDF, 3.58 MB
english, 2015