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A quasianalytic kinetic model for nonequilibrium C 2 H 2 (1 )/H 2 /Ar RF plasmas of interest in nanocrystalline diamond growth
Gordillo-V zquez, F J, Albella, J MVolume:
11
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/11/4/317
Date:
November, 2002
File:
PDF, 1.10 MB
english, 2002