Internal Gettering for Ni Contamination in Czochralski...

Journal of The Electrochemical Society 2000 Vol. 147; Iss. 8

Internal Gettering for Ni Contamination in Czochralski Silicon Wafers

Sueoka, Koji, Sadamitsu, Shinsuke, Koike, Yasuo, Kihara, Takayuki, Katahama, Hisashi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
147
Year:
2000
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1393857
File:
PDF, 268 KB
english, 2000
Conversion to is in progress
Conversion to is failed