Micromachined thermoelectric IR sensors fabricated by a...

Smart Materials and Structures 2011 / 01 Vol. 20; Iss. 1

Micromachined thermoelectric IR sensors fabricated by a self-aligned process

Xu, Dehui, Xiong, Bin, Wang, Yuelin
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Volume:
20
Language:
english
Journal:
Smart Materials and Structures
DOI:
10.1088/0964-1726/20/1/015013
Date:
January, 2011
File:
PDF, 204 KB
english, 2011
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