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SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Modeling Aspects in Optical Metrology III - Simulating photonic structures in layered geometries by the Multiple Multipole Program
Alparslan, Aytac, Hafner, Christian, Bodermann, BerndVolume:
8083
Year:
2011
Language:
english
DOI:
10.1117/12.889851
File:
PDF, 466 KB
english, 2011