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[IEEE 2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Bologna, Italy (2015.1.26-2015.1.28)] EUROSOI-ULIS 2015: 2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon - New insights on strained-Si on insulator fabrication by top recrystallization of amorphized SiGe on SOI
Bonnevialle, A., Reboh, S., Grenouillet, L., Le Royer, C., Morand, Y., Maitrejean, S., Hartmann, J.-M., Halimaoui, A., Rouchon, D., Casse, M., Plantier, C., Wacquez, R., Vinet, M.Year:
2015
Language:
english
DOI:
10.1109/ulis.2015.7063802
File:
PDF, 1.39 MB
english, 2015