SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] MOEMS Display and Imaging Systems - Nonlinear dynamics and control of a dual-capacitively driven torsional MEMS scanning mirror
Brown, Margaret K., Mansouri, Gary, Urey, HakanVolume:
4985
Year:
2003
Language:
english
DOI:
10.1117/12.472864
File:
PDF, 115 KB
english, 2003