Microsieves made with laser interference lithography for...

Journal of Micromechanics and Microengineering 1999 / 06 Vol. 9; Iss. 2

Microsieves made with laser interference lithography for micro-filtration applications

Rijn, Cees J M van, Nijdam, Wietze, Kuiper, Stein, Veldhuis, Gert J, Wolferen, Henk van, Elwenspoek, Miko
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Volume:
9
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/9/2/316
Date:
June, 1999
File:
PDF, 101 KB
english, 1999
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