A micro thermal switch with a stiffness-enhanced thermal...

Journal of Micromechanics and Microengineering 2011 / 10 Vol. 21; Iss. 10

A micro thermal switch with a stiffness-enhanced thermal isolation structure

Tsukamoto, Takashiro, Esashi, Masayoshi, Tanaka, Shuji
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Volume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/10/104008
Date:
October, 2011
File:
PDF, 972 KB
english, 2011
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