![](/img/cover-not-exists.png)
Anodic bonding using a hybrid electrode with a two-step bonding process
Luo, Wei, Xie, Jing, Zhang, Yang, Li, Chaobo, Xia, YangVolume:
33
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/33/6/066001
Date:
June, 2012
File:
PDF, 1.80 MB
english, 2012