Spatial and temporal variation of ion flux in the presence of an instability in inductively coupled SF 6 plasmas
Kim, Tae Won, Aydil, Eray SVolume:
12
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/12/2/304
Date:
May, 2003
File:
PDF, 73 KB
english, 2003