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Resist deconstruction as a probe for innate material roughness
Fedynyshyn, Theodore H.Volume:
5
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2408410
Date:
October, 2006
File:
PDF, 1.78 MB
english, 2006