Measurement of Residual Stresses in Ferroelectric Pb(Zr 0.3 Ti 0.7 )O 3 Thin Films by X-ray Diffraction
Zhu, Hui, Chu, DapingVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.128004
Date:
December, 2013
File:
PDF, 520 KB
english, 2013