Humidity Sensor Based on Partially Oxidized Porous Silicon
Balucani, Marco, Bondarenko, V., Dolgyi, L., La Monica, S., Maiello, G., Masini, G., Yakovtseva, V., Ferrari, A.Volume:
54
Year:
1997
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.54.75
File:
PDF, 540 KB
1997