Nanoindentation Analysis for Mechanical Properties of Electroless NiP Imprinting Mold Replicated from Self-Assembled-Monolayer Modified Master Mold
Lin, Cheng Ping, Saito, Mikiko, Homma, TakayukiVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.110126
Date:
November, 2013
File:
PDF, 269 KB
english, 2013