Design and fabrication of Fabry–Perot filters for infrared...

Design and fabrication of Fabry–Perot filters for infrared hyperspectral imagers

Morley, Michael L., Velicu, Silviu, Chang, Yong, Grein, Christoph H., Kozak, Dmitry A., Fernandez, Bautista, Kubby, Joel, Gupta, Neelam
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Volume:
13
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.13.1.011116
Date:
March, 2014
File:
PDF, 5.23 MB
english, 2014
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