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Design and fabrication of Fabry–Perot filters for infrared hyperspectral imagers
Morley, Michael L., Velicu, Silviu, Chang, Yong, Grein, Christoph H., Kozak, Dmitry A., Fernandez, Bautista, Kubby, Joel, Gupta, NeelamVolume:
13
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.13.1.011116
Date:
March, 2014
File:
PDF, 5.23 MB
english, 2014