Effects of Helium and Oxygen Common Implantation in Silicon Wafer
Bing-Sheng, Li, Chong-Hong, Zhang, Li-Hong, Zhou, Yi-Tao, YangVolume:
25
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/25/10/055
Date:
October, 2008
File:
PDF, 144 KB
english, 2008