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SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Electronics and Structures for MEMS - Micromachined accelerometer based on electron tunneling
Yang, Yongjun, Li, Lijie, Xu, Yongqing, Zhao, Yanjun, Liang, Chun-Guang, Wei, Tongli, Bergmann, Neil W., Reinhold, Olaf, Tien, Norman C.Volume:
3891
Year:
1999
Language:
english
DOI:
10.1117/12.364473
File:
PDF, 1.27 MB
english, 1999