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SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 24 February 2008)] Design for Manufacturability through Design-Process Integration II - Low k1 logic design using gridded design rules
Smayling, Michael C., Liu, Hua-yu, Cai, Lynn, Singh, Vivek K., Rieger, Michael L.Volume:
6925
Year:
2008
Language:
english
DOI:
10.1117/12.772875
File:
PDF, 226 KB
english, 2008