Synchronous scanning of reference mirror and objective lens...

Japanese Journal of Applied Physics 2015 / 03 Vol. 54; Iss. 3

Synchronous scanning of reference mirror and objective lens for high-resolution full-field interferometry

Kashiwagi, Ken, Kasuya, Yosuke, Kojima, Shuto, Kurokawa, Takashi
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Volume:
54
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.54.032501
Date:
March, 2015
File:
PDF, 206 KB
english, 2015
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