Suppression of Al Memory-Effect on Growing 4H-SiC Epilayers...

Japanese Journal of Applied Physics 2013 / 04 Vol. 52; Iss. 4S

Suppression of Al Memory-Effect on Growing 4H-SiC Epilayers by Hot-Wall Chemical Vapor Deposition

Ji, Shiyang, Kojima, Kazutoshi, Ishida, Yuuki, Yoshida, Sadafumi, Tsuchida, Hidekazu, Okumura, Hajime
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.04CP04
Date:
April, 2013
File:
PDF, 429 KB
english, 2013
Conversion to is in progress
Conversion to is failed