Area-Selective ALD of Titanium Dioxide Using...

Journal of The Electrochemical Society 2006 Vol. 153; Iss. 5

Area-Selective ALD of Titanium Dioxide Using Lithographically Defined Poly(methyl methacrylate) Films

Sinha, Ashwini, Hess, Dennis W., Henderson, Clifford L.
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Volume:
153
Year:
2006
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2184068
File:
PDF, 298 KB
english, 2006
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