Effect of STI-induced mechanical stress on leakage current in deep submicron CMOS devices
Rui, Li, Liu-Jiang, Yu, Ye-Min, Dong, Ching-Dong, WangVolume:
16
Language:
english
Journal:
Chinese Physics
DOI:
10.1088/1009-1963/16/10/047
Date:
October, 2007
File:
PDF, 375 KB
english, 2007